Description

Measurement Head: Wide-field model
Model IM-6125
Type Measurement head
Image sensor 1' 6.6 mega pixel CMOS
Display 10.4' LCD monitor (XGA: 1024 ? 768) External monitor connectable (clone output)
Receiver lens Double telecentric lens
Image measurement Field of view Wide field: o100 ? L200 mm, High precision: 25 ? L125 mm
Minimum display unit 0.1 µm
Repeatability W/o stage movement Wide field: ±1µm High precision: ±0.5µm
With stage movement Wide field: ±2µm High precision: ±1.5µm
Measurement accuracy (±2?) W/o binding Wide field: ±5µm*1 High precision: ±2µm*2
With binding Wide field: ± (7 +0.02L)µm*3 High precision: ± (4 +0.02L)µm*4
External remote input No-voltage input (with contacts, without contacts)
External output OK/NG/FAIL/MEAS. Relay outputRated load 24 VDC 0.5AON resistance 50 m? or less
Interface LAN RJ-45 (10BASE-T / 100BASE-TX / 1000BASE-T)
USB 2.0 series A 6 ports (front: 2, rear: 4)
Record Hard disk drive 250 GB
Illumination system Transparent Telecentric transparent illumination (Green LED)
Ring Four division ring illumination (White LED)
External Externally connected illumination (coaxial)
X stage Moving range 100 mm (electric)
Withstand load 2 kg
Z stage Moving range 30 mm (electric)
Power supply Power voltage 100 to 240 VAC 50 / 60 Hz
Power consumption 310 mA or less
Environmental resistance Ambient temperature +10 to +35 °C
Relative humidity 20 to 80 % RH (No condensation)
Weight Approx 31 kg
*1 In the range of o80 mm from the centre of the stage within the operating temperature range of +23°C ±1°C at the focused focal point position *2 In the range of o20 mm from the centre of the stage within the operating temperature range of +23°C ±1°C at the focused focal point position *3 In the range of o80 ? 180 mm from the centre of the stage, within the operating temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 1 kg or less on the stage (L = amount of stage movement in mm units) *4 In the range of o20 ? 120 mm from the centre of the stage, within the operating temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 1 kg or less on the stage (L = amount of stage movement in mm units)
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