Description

Controller
Model IM-6700
Type Controller
Image sensor 1' 6.6 mega pixel monochrome CMOS
Display 10. 4' LCD monitor (XGA: 1024 ? 768) External monitor connectable (clone output)
Receiver lens Double telecentric lens
Image measurement Field of view Wide field: o100 ? L200 mm, High precision: 25 ? L125 mm
Minimum display unit 0.1 µm
Repeatability W/o stage movement Wide field: ±1 µm, High precision: ±0. 5 µm
With stage movement Wide field: ±2 µm, High precision: ±1. 5 µm
Measurement accuracy (±2?) W/o binding Wide field: ±5 µm*1, High precision: ±2 µm*2
With binding Wide field: ±(7 + 0. 02 L) µm*3, High precision: ±(4 + 0. 02 L) µm*4
External remote input Non-voltage input (with and without contact)
External output OK/NG/FAIL/MEAS. Relay output/rated load: 24 VDC, 0. 5 A/ON resistance
Interface LAN RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
USB 2.0 series A 6 ports (front: 2, rear: 4)
Record Hard disk drive 250 GB
Illumination system Transparent Telecentric transparent illumination
Ring Four division, multi-angle illumination (electric) Slit ring (directivity) illumination (electric)
X stage Moving range 100 mm (electric)
Z stage 30 mm (electric)
Withstand load 2 kg
Measurement points 99 points max. (99 ? 9 points possible when the function for consolidating measurement settings is used)
Pattern search (profi le tracking function) XY? (with 360° rotary position compensation)
Pattern registration 1000 patterns or more*5
Measurement time 2 seconds*6
Basic measurement function Distance measurement 8 types (point-point/line-point/line-line/circle-point/circle-line/circle-circle/circle/arc)
Angle measurement Provided
Calculation
Virtual line function Point Middle point/intersection
Conjunction edge Line conjunction/circular conjunction
Line 6 types (midline/perpendicular line/parallel lines/tangent line/line passing through a point/approximate line)
Circle Middle circle/approximate circle/auxiliary circle/inscribed and circumscribed circle
Application tool Pitch measurement Line/circumference
Pitch angle
Width measurement Edge width
Thickness measurement Thickness measurement/gap measurement between inner and outer diameters
Special tool Rounded corner/curved surface/oval/reticle/point position/perimeter/area/screw/automatic measurement
GD&T Shape tolerance Straightness/circularity/profile
Orientation tolerance Squareness/parallelism
Position tolerance Point position/concentricity
Element tool Point Point (on a line or arc)/maximum and minimum (rectangle, circle, arc)
Line Line/centre line/peak line
Circle Circle/arc/peak circle/peak arc
Profi le extraction Provided
Special tool Automatic generation/gauge line
Manual measurement Provided
Coordinate system confi guration
Batch confi guration of tolerance
Element list editing
Measurement setting data binding function
DXF export function
Automatic measurement function
Q-DAS data save function
Measurement settings support functions Provided*7
Power supply Power voltage 100 to 240 VAC 50/60 Hz
Power consumption 310 VA max.
Environmental resistance Ambient temperature +10 to +35 °C
Relative humidity 20 to 80 % RH (No condensation)
Weight Approx. 8 kg
*1 In the range of o80 mm from the centre of the stage within the operating ambient temperature range of +23°C ±1.0°C at the focused focal point position *2 In the range of o20 mm from the centre of the stage within the operating ambient temperature range of +23°C ±1.0°C at the focused focal point position *3 In the range of o80 ? 180 mm from the centre of the stage, within the operating ambient temperature range of +23°C ±1.0°C at the focused focal point position, and with a load weighing 1 kg or less on the stage (L = amount of stage movement in mm units) *4 In the range of o20 ? 120 mm from the centre of the stage, within the operating ambient temperature range of +23°C ±1.0°C at the focused focal point position, and with a load weighing 1 kg or less on the stage (L = amount of stage movement in mm units) *5 Depending on the measurement setting data and number of data pieces being stored *6 Without pattern search, applied measurement, and stage movement *7 Optimum lighting guide, optimum lighting search, automatic edge extraction parameter adjustment function, and multiple edge extraction function
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