Description

Measurement unit
Model VK-X260K
Total magnification Up to 28000?*1
Field of view (minimum range) 11 to 5400 µm
Frame rate Laser measurement speed 4 to 120 Hz, 7,900 Hz*2
Measurement principles Optical system Pinhole confocal optical system
Height measurement Linear scale 0.5 nm
Repeatability ? 20?: 40 nm, 50?: 12 nm, 150?: 12 nm *3
Memory for Z-axis measurement 14 million steps
Accuracy 0.2 + L/100 µm or better*4*5
Width measurement Display resolution 1 nm
Repeatability 3? 20?: 100 nm, 50?: 40 nm, 150?: 20 nm*3
Accuracy ±2%*3
XY stage configuration Manual: Operating range 70 mm?70 mm
Motorized: Operating range 50 ? 50 mm, 100 ? 100 mm*6
Observation Maximum capture resolution 3072?2304
Weight Microscope Approx. 26 kg (without sensor head, approx. 10 kg)
Controller Approx. 11 kg
*1 With a 23-inch monitor. *2 At maximum speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan is within a measurement pitch of 0.1 µm. *3 When measuring the reference scale with the 20? objective lens (or higher) at an ambient temperature of 20 ± 2 °C. With the exception of the VK-X120/X130 with the 100? objective lens. *4 When measuring the reference scale with the 20x objective lens (or higher) at an ambient temperature of 20 ±2 °C. With the e x ception of the VK-X120/X130 with the 100x objective lens. *5 L = Vertical measurement length in µm *6 With a motorised stage.
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