Description

Shape Measurement Laser Microscope
Model VK-X100K
Type Controller
Objective lens magnification Magnification on a 15” monitor 100x ?
Magnification on a 15” monitor 200x
Magnification on a 15” monitor 400x
Magnification on a 15” monitor 1000x
Magnification on a 15” monitor 2000x
Magnification on a 15” monitor 3000x
Observation/ measuring range Horizontal (H): ?m Magnification on a 15” monitor 100x
Magnification on a 15” monitor 200x
Magnification on a 15” monitor 400x
Magnification on a 15” monitor 1000x
Magnification on a 15” monitor 2000x
Magnification on a 15” monitor 3000x
Vertical (V): ?m Magnification on a 15” monitor 100x
Magnification on a 15” monitor 200x
Magnification on a 15” monitor 400x
Magnification on a 15” monitor 1000x
Magnification on a 15” monitor 2000x
Magnification on a 15” monitor 3000x
Working distance: mm Magnification on a 15” monitor 100x
Magnification on a 15” monitor 200x
Magnification on a 15” monitor 400x
Magnification on a 15” monitor 1000x
Magnification on a 15” monitor 2000x
Magnification on a 15” monitor 3000x
Numerical Aperture (N.A.) Magnification on a 15” monitor 100x
Magnification on a 15” monitor 200x
Magnification on a 15” monitor 400x
Magnification on a 15” monitor 1000x
Magnification on a 15” monitor 2000x
Magnification on a 15” monitor 3000x
Optical zoom 1x to 8x
Total magnification 100x to 8000x
Optical system for observation/measurement Pinhole confocal optical system
Height measurement Measuring range 7 mm
Z-resolution 0.005 µm
Repeatability ? 0.02 µm*1
Width measurement Display resolution 0.01 µm
Repeatability 3? 0.05 µm*2
Frame memory Pixel count 2048 x 1536, 1024 x 768, 1024 x 64
For monochrome image 16 bit
For colour image 8-bit for RGB each
For height measurement 21-bit
Frame rate Surface scan 4 Hz to 120 Hz
Line scan 7900 Hz
Auto function AAG (Auto gain), Auto focus, Auto upper/lower limit setting, Double Scan brightness settings
Measurement laser light source for measurements Wavelength Red semiconductor laser, 658 nm
Maximum output power 0.95 mW
Laser Class Class 2 Laser Product (IEC 60825-1, FDA (CDRH) Part1040.10 *3)
Laser light-receiving element PMT (Photoelectron Multiplier Tube)
Light source for optical observation Lamp 100 W halogen lamp
Colour camera for optical observation Imaging element 1/3' Colour CCD image sensor
Recording resolution Super high resolution (3072?2304)
Auto adjustment Gain, Shutter speed
Data processing unit Dedicated PC, supplied by KEYENCE with the VK-X (OS: Windows 7 Professional Edition) *4
Rating Power voltage 100 to 240 VAC ±10 %, 50/60 Hz
Power consumption 450 VA max.
Weight Approx. 11 kg
*1 When a standard height difference of 2 µm is measured with the 50x objective lens. *2 When the KEYENCE reference chart line width of 1 µm is measured with the 50 x objective lens (optical zoom 2 x) in line peak mode (image averaging: 8 times). *3 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No.50. *4 Windows 7 is a registered trademark of Microsoft, U.S.A.
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