Description

Measurement head: Red semiconductor laser
Model VK-X1050
Type measurement head
Total magnification Up to 28,800 x*1
Field of view (minimum range) 11 to 7,398 µm
Frame rate (laser measurement speed) 4 to 125 Hz, 7,900 Hz*2
Measurement principle Optical system Pinhole confocal optical system, Focus variation
Light-receiving element 16-bit sensing: photomultiplier, High-definition colour CMOS
Scanning method (during general measurement and image stitching) Automatic upper/lower limit setting, rapid laser light intensity setting (AAGII) , automatic detection and rescanning in case of poor reflection (double scan)
Height measurement Display resolution 5 nm
Linear scale
Dynamic range 16 bits
Repeatability ? Laser confocal 20 x, 40 nm, 50 x, 20 nm
Focus variation 5 x, 500 nm, 10 x, 100 nm, 20 x, 50 nm, 50 x, 30 nm
Height data acquisition range 0.7 million steps
Accuracy 0.2 + L /100 µm or better*3
Width measurement Display resolution 10 nm
Repeatability 3? Laser confocal 20 x, 100 nm, 50 x, 50 nm
Focus variation 5 x, 400 nm, 10 x, 400 nm, 20 x, 120 nm, 50 x, 65 nm
Accuracy ±2 %*3
XY stage configuration Manual: Moving range 70 mm x 70 mm
Motorised: Moving range 100 mm x 100 mm
Observation Image options High-definition colour CMOS image 16-bit laser colour confocal image Confocal optical system with ND filter C-laser DIC image (differential interference image)
Illumination Ring illumination, coaxial illumination
Laser light source for measurements Wavelength Red semiconductor laser, 661 nm
Maximum output power 1 mW
Laser class Class 2 laser product (IEC60825-1)
Power supply Power voltage 100 to 240 VAC, 50/60 Hz
Current consumption 150 VA
Weight Approx. 13.0 kg
*1 23 inch full-screen display. *2 At maximum speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan is within a measurement pitch of 0.1 µm. *3 When measuring a standard sample (standard scale) with a 20 x objective lens (or higher).
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